1,4-Oxathianium, 4-[4-(1,1-dimethylethyl)phenyl] -, salt with 1-(5,5,6,6-tetrafluorospiro[1,3-d ioxepane-2,2'-tricyclo[3.3.1.13, 7]decan]-5'-yl) 2,2-difluoro-2-sulfoacetate (1:1) CAS 1371590-55-4 (This line of electronic-grade chemicals can be customized to meet your specific requirements for metal impurity levels; we welcome custom orders.) 

1. Core applications: 193 nm ArF dry and immersion lithography resists, as well as EUV extreme ultraviolet lithography resists, utilize a photoacid generator (PAG) specifically designed for these processes. This PAG belongs to the sulfonium‑type cationic class, and its molecular structure features a fluorinated aliphatic cyclic chain that imparts low acid diffusion, high photosensitivity, and low volatility, while also delivering excellent resistance to dry etching. It serves as the key photosensitive component in high‑end chemically amplified resists.

2. ArF immersion photoresists for 14 nm and below advanced process nodes, as well as EUV extreme ultraviolet photoresists for 7 nm and below, can significantly reduce line width roughness (LWR), enhance pattern resolution and process window, and are suitable for high-end semiconductor wafer lithography processes such as logic chips, DRAM, and NAND flash memory.

3. A PAG for the 193 nm immersion lithography topcoat enables simultaneous exposure and development of the coating and photoresist, eliminates residual defects, and improves wafer yield.

4. Photoinitiator for specialized cationic photocuring systems, used in the photocuring of precision optical micro‑ and nanostructures and nanoimprint lithography resists.

Specifications: Fluorine spectrum purity ≥99%, individual metal ion content <50 ppb, acid value 0.

Store in a cool, dark place, tightly sealed.

Jiangsu Juming Chemical Technology Co., Ltd. was established in November 2017 and has been deeply engaged in the chemical industry for many years. The company is headquartered in Jiangyin City, Jiangsu Province, with production facilities located across China in Shandong, Hebei, Henan, and Hubei Provinces. Its laboratory is equipped with state-of-the-art analytical instruments, including four gas chromatographs and eight liquid chromatographs. The company primarily manufactures and markets high‑purity electronic chemicals, water treatment agents, UV absorbers, agrochemical and pharmaceutical intermediates, and other fine chemical products, which are widely exported to Europe, the United States, Japan, South Korea, and numerous other countries and regions. Key products include 5‑methylbenzotriazole at an annual capacity of 2,000 tons; 1,2,3‑benzotriazole (BTA) at 3,000 tons per year; benzotriazole sodium salt (BTA‑Na) at 2,000 tons per year; methylbenzotriazole (TTA) at 3,000 tons per year; methylbenzotriazole sodium salt (TTA‑Na) at 2,000 tons per year; carbohydrazide (carbonyl hydrazine) at 2,000 tons per year; and benzophenone (BP) at 2,000 tons per year. These products find extensive applications in water treatment, chemical intermediates, agrochemicals, pharmaceuticals, UV absorbers, fertilizers, textile dyeing and printing, flame retardants for fire‑proof materials, and the production of magnesium salts. The company holds ISO 9001 certification, SGS certification, and CMA testing accreditation. 
Since its establishment, the company has earned the recognition of numerous clients and built a strong reputation through word of mouth. The team at Juming will work in close collaboration with partners across society to achieve shared success! 
 

We have a professional export team and our chemicals are exported to European、Asia and American countries. We can do OEM and ODM services. We have a chemicals develop team that develops and designs new chemicals every year.

1,4-Oxathianium, 4-[4-(1,1-dimethylethyl)phenyl] -, salt with 1-(5,5,6,6-tetrafluorospiro[1,3-d ioxepane-2,2'-tricyclo[3.3.1.13, 7]decan]-5'-yl) 2,2-difluoro-2-sulfoacetate (1:1) CAS 1371590-55-4 (This line of electronic-grade chemicals can be customized to meet your specific requirements for metal impurity levels; we welcome custom orders.) 

1. Core applications: 193 nm ArF dry and immersion lithography resists, as well as EUV extreme ultraviolet lithography resists, utilize a photoacid generator (PAG) specifically designed for these processes. This PAG belongs to the sulfonium‑type cationic class, and its molecular structure features a fluorinated aliphatic cyclic chain that imparts low acid diffusion, high photosensitivity, and low volatility, while also delivering excellent resistance to dry etching. It serves as the key photosensitive component in high‑end chemically amplified resists.

2. ArF immersion photoresists for 14 nm and below advanced process nodes, as well as EUV extreme ultraviolet photoresists for 7 nm and below, can significantly reduce line width roughness (LWR), enhance pattern resolution and process window, and are suitable for high-end semiconductor wafer lithography processes such as logic chips, DRAM, and NAND flash memory.

3. A PAG for the 193 nm immersion lithography topcoat enables simultaneous exposure and development of the coating and photoresist, eliminates residual defects, and improves wafer yield.

4. Photoinitiator for specialized cationic photocuring systems, used in the photocuring of precision optical micro‑ and nanostructures and nanoimprint lithography resists.

Specifications: Fluorine spectrum purity ≥99%, individual metal ion content <50 ppb, acid value 0.

Store in a cool, dark place, tightly sealed.

Jiangsu Juming Chemical Technology Co., Ltd. was established in November 2017 and has been deeply engaged in the chemical industry for many years. The company is headquartered in Jiangyin City, Jiangsu Province, with production facilities located across China in Shandong, Hebei, Henan, and Hubei Provinces. Its laboratory is equipped with state-of-the-art analytical instruments, including four gas chromatographs and eight liquid chromatographs. The company primarily manufactures and markets high‑purity electronic chemicals, water treatment agents, UV absorbers, agrochemical and pharmaceutical intermediates, and other fine chemical products, which are widely exported to Europe, the United States, Japan, South Korea, and numerous other countries and regions. Key products include 5‑methylbenzotriazole at an annual capacity of 2,000 tons; 1,2,3‑benzotriazole (BTA) at 3,000 tons per year; benzotriazole sodium salt (BTA‑Na) at 2,000 tons per year; methylbenzotriazole (TTA) at 3,000 tons per year; methylbenzotriazole sodium salt (TTA‑Na) at 2,000 tons per year; carbohydrazide (carbonyl hydrazine) at 2,000 tons per year; and benzophenone (BP) at 2,000 tons per year. These products find extensive applications in water treatment, chemical intermediates, agrochemicals, pharmaceuticals, UV absorbers, fertilizers, textile dyeing and printing, flame retardants for fire‑proof materials, and the production of magnesium salts. The company holds ISO 9001 certification, SGS certification, and CMA testing accreditation. 
Since its establishment, the company has earned the recognition of numerous clients and built a strong reputation through word of mouth. The team at Juming will work in close collaboration with partners across society to achieve shared success!